Semiconductor component with integrated capacitance...

Details Semiconductor component with integrated capacitance... Semiconductor component with integrated capacitance...

2006-06-13

2006-06-13

Dinkins, Anthony (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S303000, C361S306300, C257S306000, C257S532000, C438S393000

Reexamination Certificate

active

07061746

ABSTRACT:
A semiconductor component includes an insulating layer, which is configured on a semiconductor substrate and in which a capacitor structure is formed. The capacitor structure has at least two parallel metallization planes, whereby at least one of the planes is configured in a lattice and inhomogeneous structure, which are electrically connected to the first metallization plane, extended at least partially into the cavities of the latticework metallization plane.

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“Capacity limits and matching properties of integrated capacitors,” by R. Aparicio et al., IEEE Journal of Solid-State Circuits, IEEE Inc. New York, US, vol. 37, No. 3, Mar. 2002, pp. 384-393.
“Capacity limits and matching properties of lateral flux integrated capacitors,” by H. Aparicio et al., IEEE Custom Integrated Circuits Conference, San Diego, May 6-9, 2001, pp. 365-368.

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