Semiconductor cleaning using superacids

Details Semiconductor cleaning using superacids Semiconductor cleaning using superacids

2011-04-12

2011-04-12

Mc Ginty, Douglas (Department: 1765)

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

C510S176000, C510S177000, C510S178000, C134S001300, C134S042000, C134S902000, C438S906000

Reexamination Certificate

active

07923424

ABSTRACT:
A method of cleaning a substrate includes contacting a surface of a semiconductor substrate with a composition comprising a superacid. The semiconductor substrate may be a wafer.

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