Semiconductor cleaning apparatus and wafer cassette

Details Semiconductor cleaning apparatus and wafer cassette Semiconductor cleaning apparatus and wafer cassette

1995-07-17

1997-01-07

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

Miscellaneous

134902, 211 41, B08B 1102

Patent

active

055906729

ABSTRACT:
A semiconductor cleaning apparatus includes a cassette loader/unloader for moving a cassette; a product loader/unloader for loading a wafer into and unloading a wafer from a cassette; a cleaner for cleaning a wafer; a water cleaner for cleaning with water a wafer that has been cleaned in the cleaner; a dryer for drying the wafer that has been cleaned with water in the water cleaner; and a conveyance having a wafer grasping hand for directly holding a wafer unloaded from a cassette and sequentially conveying the wafer held by the wafer hand to the cleaner, the water cleaner, and the dryer.

REFERENCES:
patent: 3610613 (1971-10-01), Worden
patent: 3964957 (1976-06-01), Walsh
patent: 4208760 (1980-06-01), Dexter et al.
patent: 4974619 (1990-12-01), Yu
patent: 4985722 (1991-01-01), Ushijima et al.
patent: 5092011 (1992-03-01), Gommori et al.
patent: 5168886 (1992-12-01), Thompson et al.
patent: 5191908 (1993-03-01), Hiroe et al.
patent: 5301700 (1994-04-01), Kamikawa et al.

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