Semiconductor cleaner comprising a reducing agent,...

Details Semiconductor cleaner comprising a reducing agent,... Semiconductor cleaner comprising a reducing agent,...

2001-06-14

2008-07-08

Boyer, Charles I (Department: 1796)

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

C510S431000, C510S434000, C510S436000, C134S001200, C134S001300

Reexamination Certificate

active

07396806

ABSTRACT:
To provide a detergent composition which has little corrosion to a wiring material and is excellent in cleaning ability of a semiconductor substrate or semiconductor device on which the fine particles and the metal impurities are deposited. A detergent composition comprising a reducing agent, wherein the detergent composition has an oxidation-reduction potential at 25° C. of +0.2 V or less, and a pH at 25° C. of from 3 to 12; and a cleaning process of a semiconductor substrate or a semiconductor device using the detergent composition.

REFERENCES:
patent: 4810405 (1989-03-01), Waller et al.
patent: H953 (1991-08-01), Goto et al.
patent: 5192460 (1993-03-01), Thomas et al.
patent: 5607718 (1997-03-01), Sasaki et al.
patent: 5612304 (1997-03-01), Honda et al.
patent: 5700383 (1997-12-01), Feller et al.
patent: 5705089 (1998-01-01), Sugihara et al.
patent: 5770095 (1998-06-01), Sasaki et al.
patent: 6030932 (2000-02-01), Leon et al.
patent: 6242407 (2001-06-01), Bertacchi et al.
patent: 6265781 (2001-07-01), Andreas
patent: 6387190 (2002-05-01), Aoki et al.
patent: 6395693 (2002-05-01), Wang
patent: 6465403 (2002-10-01), Skee
patent: 6492308 (2002-12-01), Naghshineh et al.
patent: 6585825 (2003-07-01), Skee
patent: 6734155 (2004-05-01), Herbots et al.
patent: 2002/0144710 (2002-10-01), Aoki et al.
patent: 7247500 (1995-09-01), None
patent: 0812011 (1997-12-01), None
patent: 0875926 (1998-11-01), None
patent: 0924970 (1999-06-01), None
patent: 07247500 (1995-09-01), None
patent: 11-138113 (1999-05-01), None
patent: 11138113 (1999-05-01), None
patent: 11251280 (1999-09-01), None
patent: 11-330023 (1999-11-01), None
patent: 11330023 (1999-11-01), None
patent: 2000144193 (2000-05-01), None
patent: 99/60448 (1999-11-01), None
patent: WO-01/24242 (2001-04-01), None
patent: WO01/36578 (2001-05-01), None

Affiliated with

Also associated with

Rating

Semiconductor cleaner comprising a reducing agent,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor cleaner comprising a reducing agent,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor cleaner comprising a reducing agent,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3964413