Measuring and testing – Volume or rate of flow – Thermal type
Patent
1985-11-27
1987-09-15
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
046931163
ABSTRACT:
A gas-flow measuring apparatus including a semiconductor chip and a sensing circuit. The semiconductor chip includes an electric heater and two temperature-detecting elements. One of the temperature-detecting elements is located closer to the heater than the other. The sensing circuit generates voltage in response to the flow rate of gas flowing through a gas passage.
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Hattori Tadashi
Iwasaki Yukio
Kanehara Kenji
Kohama Tokio
Miura Kazuhiko
Goldstein Herbert
Nippon Soken Inc.
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