Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Patent
1996-04-24
1998-06-09
Arroyo, Teresa M.
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
257620, 257758, 257786, H01L 2358, H01L 23544, H01L 2348
Patent
active
057639361
ABSTRACT:
A resin molded semiconductor device having wiring layers and interlayer insulating layers inclusive of an SOG film, capable of suppressing generation of cracks in an SOG film to be caused by thermal stress. In the outer peripheral area of a semiconductor chip, via holes are formed in an interlayer insulating layer inclusive of an SOG film to substantially reduce residual SOG film. As an underlying layer of the interlayer insulating layer inclusive of the SOG film, dummy wiring patterns are formed to thin the SOG film on the dummy wiring patterns. Dummy wiring patterns may also be formed by using a higher level wiring layer, burying the via holes and contacting the lower level dummy wiring patterns.
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patent: 5448112 (1995-09-01), Hara
Inoue Yushi
Naito Masaru
Yamaha Takahisa
Arroyo Teresa M.
Yamaha Corporation
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