Semiconductor chip and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – Smart card package

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Details

257922, H01L 2358, H01L 2302

Patent

active

060607734

ABSTRACT:
A semiconductor chip has a nonvolatile memory formed on the upper surface side of a semiconductor substrate. The chip includes at least one recess portion formed in the lower surface of the semiconductor substrate. The recess portion is located in a region corresponding to the nonvolatile memory. A method of manufacturing the semiconductor chip is also disclosed.

REFERENCES:
patent: 4328414 (1982-05-01), Atalla
patent: 4453074 (1984-06-01), Weistein
patent: 5131091 (1992-07-01), Mizuta
patent: 5450366 (1995-09-01), Watanabe
patent: 5510655 (1996-04-01), Tanielian
patent: 5608718 (1997-03-01), Schiewe

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