Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Patent
1997-02-26
1998-07-28
Hardy, David B.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Responsive to non-optical, non-electrical signal
73 3106, 338 34, H01L 2358, G01N 700, H01C 700
Patent
active
057866082
ABSTRACT:
A semiconductor device (50) comprises a semiconductor base, a heater (20) formed over the semiconductor base from conductive material, such as polysilicon, and a layer (22) for heating by the heater. The heater (20) comprises first (24) and second (26) arms extending over the semiconductor base from a heater portion (28) and an opening (34) extending vertically through the heater portion (28). A first heater contact (30) is coupled to an end of the first arm (24) and a second heater contact (32) is coupled to an end of the second arm (26). The layer (22) is formed over the opening (34) and heater portion (28) such that a vertical axis through the center (36) of the opening (34) extends through the center (36) of the layer (22).
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Gue Anne-Marie
Lescouzeres Lionel
Seube Alain
Dover Rennie William
Hardy David B.
Motorola Inc.
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