Semiconductor chemical sensor device and method of forming a the

Details Semiconductor chemical sensor device and method of forming a the Semiconductor chemical sensor device and method of forming a the

1997-02-13

1999-03-09

Soderquist, Arlen

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing liquid or solid sample

422 8201, 422 8203, 422 95, 422 98, 73 3105, 338 34, G01N 2714

Patent

active

058796304

ABSTRACT:
A semiconductor chemical sensor device (2) comprises a sensitive layer (4) for detecting specific chemicals and a heater for heating the sensitive layer, which is formed by a heater portion (6) of a conductive layer (8) in the semiconductor chemical sensor device (2). The semiconductor chemical sensor device (2) further comprises a thermocouple (12) for detecting the temperature of the sensitive layer (4), the thermocouple comprising a P/N junction (14) formed as part of or adjacent the heater portion (6) of the conductive layer (8) such that a signal developed across the P/N junction (14) is representative of the temperature of the sensitive layer (4).

REFERENCES:
patent: 3766444 (1973-10-01), Bosch
patent: 3932246 (1976-01-01), Stadler et al.
patent: 4141955 (1979-02-01), Obiaya
patent: 4283261 (1981-08-01), Maurer et al.
patent: 4313338 (1982-02-01), Abe et al.
patent: 4325912 (1982-04-01), Sawa et al.
patent: 5140393 (1992-08-01), Hijikihigawa
patent: 5600174 (1997-02-01), Reay et al.
patent: 5602324 (1997-02-01), Yanagida et al.
C. Gladun et al. Proc. Int. Conf. Thermoelectr. 1992, 11th, 92-97.
S. Nowak et al. Proc. SPIE-Int. Soc. Opt. Eng. 1992, 1783, 315-321.

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