Semiconductor boule pulling rod

Details Semiconductor boule pulling rod Semiconductor boule pulling rod

1984-06-07

1986-09-23

Lacey, David L.

Chemical apparatus and process disinfecting, deodorizing, preser

Elements or adjuncts

422249, 156617SP, 156DIG98, C30B 3500

Patent

active

046134867

ABSTRACT:
A single-crystal boule pulling rod for pulling a boule from a melt utilizing the Czochralski method including a main pulling rod and a heat insulating layer surrounding the main pulling rod. The main pulling rod, which may be either bar-shaped or composed of two concentric pipes, is forcibly cooled. Preferably, a pipe made of molybdenum or stainless steel is provided around the heat insulating material.

REFERENCES:
patent: 3488157 (1970-01-01), Koffer
patent: 3704093 (1972-11-01), Haggerty et al.
patent: 4158038 (1979-06-01), Jewett
patent: 4187139 (1980-02-01), Brice et al.
patent: 4478676 (1984-10-01), Belt et al.
A. J. Singh, Journal of Crystal Growth, "A New Design for Water Cooled Czochralski Holder", 51, 635-636, 1981.

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