Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Patent
1997-03-12
1998-10-27
Prenty, Mark V.
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
257724, H01L 2900
Patent
active
058281223
ABSTRACT:
A semiconductor device comprises a substrate (1) with a plane surface (4) on which a layer structure (2) is formed in a number of layers (5, 7, 9, 13, 15, 17). The side of the substrate on which the layer structure was formed is fastened to a plane support body (18) by means of a glue layer (19) which encompasses spacer elements (20). These spacer elements are fastened to the surface of the substrate and all have the same height measured from the surface (4). In fastening the substrate to the support body, glue is provided and the substrate is pressed onto the support body so that the pressure is evenly distributed over the spacer elements.
REFERENCES:
patent: 4450377 (1984-05-01), Briese
patent: 4626478 (1986-12-01), van Dyh Soerewyn
patent: 4635356 (1987-01-01), Ohuchi et al.
patent: 5564181 (1996-10-01), Dineen et al.
Dekker Ronald
Maas Henricus G. R.
Michielsen Theodorus M.
Van Den Einden Wilhelmus T. A. J.
Biren Steven R.
Prenty Mark V.
U.S. Philips Corporation
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