Semiconductor based pressure sensor

Details Semiconductor based pressure sensor Semiconductor based pressure sensor

2007-10-09

2007-10-09

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S755000

Reexamination Certificate

active

11394006

ABSTRACT:
The present invention provides a pressure sensor. The pressure sensor comprises a substrate with several support structures attached to the substrate. The pressure sensor further includes a strut structure integrated with a heating element. The strut structure is engaged with the support structures so as to create an air gap between the heating element and the substrate. The heating element has an electrical resistance proportional to changes in air pressure in the air gap.

REFERENCES:
patent: 4541286 (1985-09-01), Holme
patent: 4995264 (1991-02-01), Stocker et al.
patent: 5633465 (1997-05-01), Kaufmann et al.
patent: 6227056 (2001-05-01), Bills et al.
patent: 6648592 (2003-11-01), Escure et al.

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