Traversing hoists – Overhead – Self-propelled trolley
Reexamination Certificate
2011-08-09
2011-08-09
Brahan, Thomas J. (Department: 3654)
Traversing hoists
Overhead
Self-propelled trolley
C212S270000, C414S940000
Reexamination Certificate
active
07992734
ABSTRACT:
A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.
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Campbell Philip L.
Joe Denise B.
Sherwood Edward
Brahan Thomas J.
International Business Machines - Corporation
MacKinnon Ian D.
Roberts Mlotkowski Safran & Cole P.C.
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