Semiconductor array tester

Details Semiconductor array tester Semiconductor array tester

2007-08-14

2007-08-14

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Lamp beam direction or pattern

C324S1540PB, C324S765010, C356S237100

Reexamination Certificate

active

10733903

ABSTRACT:
An array tester (10) characterizes individual ones (111) of a semiconductor devices of an array (11) based on polarization-resolving an optical far-field measurement of the individual chips (111) as a function of angular position. Two pairs of TM and TE detectors (41a-band42a-b) or one pair displaceable by ninety degrees, move in vertical and horizontal arc paths or fixed around a fixed position of a selected device of an array to sample the far-fields.

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