Semiconductor angular velocity determining device

Details Semiconductor angular velocity determining device Semiconductor angular velocity determining device

1996-11-01

1999-12-21

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01D 904

Patent

active

06003372&

ABSTRACT:
A semiconductor angular velocity determining device includes a piezoelectric substance, a first substrate 21 disposed on the piezoelectric substance, a detector main body disposed on the first substrate 21 and a second substrate for holding the detector main body in cooperation with the first substrate 21 therebetween. The detector main body includes an oscillator 27 having a linear beam portion 26 with a one end 26a of the beam portion 26 being directly fixed to the first substrate 21. Further, the other end 26b of the beam portion 26 draws an elliptical locus in response to the combined force resulting from a force from the piezoelectric substance for producing oscillation along the plane of the first substrate 21 and a Coriolis force acting on the first substrate 21 in a perpendicular direction. With this arrangement, there can be obtained the semiconductor angular velocity determining device capable of improving a determining sensitivity and a determining accuracy.

REFERENCES:
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 5633594 (1997-05-01), Okada

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