Semiconductor accelerometer switch

Details Semiconductor accelerometer switch Semiconductor accelerometer switch

1999-02-05

2000-06-20

Gellner, Michael L.

Electricity: circuit makers and breakers

Electrostrictive or electrostatic

200415, 200417, 7351401, H01H 5700

Patent

active

060780169

ABSTRACT:
A semiconductor accelerometer switch having a fixed portion including a first control electrode and a movable portion including a movable body. By applying a voltage between the first control electrode and an electrode on the movable body, electrostatic attraction holds the movable body in an initial position. The movable body is displaced when acceleration having a magnitude in a direction acts on the switch. The threshold of acceleration to be detected and general-purpose properties of the accelerometer switch are easily adjusted.

REFERENCES:
patent: 5231879 (1993-08-01), Yamamoto
patent: 5243861 (1993-09-01), Kloeck et al.
patent: 5415043 (1995-05-01), Zabler et al.
patent: 5828138 (1998-10-01), McIver et al.
patent: 5889311 (1999-03-01), Shinogi et al.
Noetzel et al., "Quasianalog Accelerometer Using Microswitch Array", The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995, pp. 671-674.
Sun et al., "A Surface Micromachined Latching Accelerometer", 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Jun. 16-19, 1997, pp. 1189-1192.

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