Semiconductor accelerometer having reduced sensor plate flexure

Details Semiconductor accelerometer having reduced sensor plate flexure Semiconductor accelerometer having reduced sensor plate flexure

1993-11-08

1998-09-29

Williams, Herzon E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351424, 7351432, G01P 1513, G01P 15125

Patent

active

058147276

ABSTRACT:
A semiconductor accelerometer is formed with a sensor plate that remains substantially planar when acceleration forces are applied. The sensor plate is supported by support beams that are attached to the sensor plate at constraint points. A portion of the mass of the sensor element is cantilevered outward past the constraint points. During the application of acceleration forces, the cantilevered mass creates a counterbalancing moment that maintains the sensor plate in a substantially planar state.

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