Semiconductor accelerometer having a cantilevered beam with a tr

Details Semiconductor accelerometer having a cantilevered beam with a tr Semiconductor accelerometer having a cantilevered beam with a tr

1990-06-20

1997-01-14

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351436, G01P 1512

Patent

active

055941729

ABSTRACT:
A semiconductor accelerometer, including a weight and a cantilevered beam formed in a silicon semiconductor substrate as a frame having a (100) surface, and a strain sensing device formed in a surface portion near a support portion of the cantilevered beam, the silicon cantilevered beam having a triangular cross section defined by one (100) surface and two (111) surfaces or a pentagonal cross section defined by one (100) surface, two (110) surfaces and two (111) surfaces. A method for producing the semiconductor accelerometer is also disclosed.

REFERENCES:
patent: 4600934 (1986-07-01), Aine et al.
patent: 4882933 (1989-11-01), Petersen et al.
patent: 5121633 (1992-06-01), Murakami et al.
Lynn Michelle Roylance et al., "A Batch-Fabricated Silicon Accelerometer", IEEE Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.

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