Semiconductor accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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Details

7351436, G01P 1508

Patent

active

055678807

ABSTRACT:
A semiconductor accelerometer includes a mass portion formed at a center of a silicon plate, a frame portion formed around the circumference of the silicon plate so as to surround the mass portion and a diaphragm portion formed in the silicon plate between the mass portion and the frame portion so as to bridge the mass portion with the frame portion, one of major surfaces of the silicon plate serving as a common continuous major surface for the mass portion, frame portion and diaphragm portion. Piezoresistance elements are formed on the common continuous major surface at the diaphraqm portion and an additional Au film is formed on the common continuous major surface at the mass portion. The additional Au film constitutes in combination with the mass portion a weight which responds to an acceleration acting thereon. The mass of the additional Au film is selected in such a manner that the center of gravity of the weight is located within an area in the mass portion having a depth corresponding to the thickness of the diaphragm portion.

REFERENCES:
patent: 4670092 (1987-06-01), Motamedi
patent: 4706374 (1987-11-01), Murakami
patent: 4951510 (1990-08-01), Holm-Kennedy
patent: 4987781 (1991-01-01), Reimann
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5195371 (1993-03-01), Grieff
patent: 5239870 (1993-08-01), Kaneko
patent: 5265474 (1993-11-01), Chaffin

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