Semiconductor accelerometer

Details Semiconductor accelerometer Semiconductor accelerometer

1987-09-17

1989-05-16

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73517R, 73651, 338 5, G01P 1512

Patent

active

048298220

ABSTRACT:
A semiconductor accelerometer includes a package containing damping liquid. A base is fixedly disposed within the package. A semiconductor plate is disposed within the package and is supported on the base. The semiconductor plate has a movable free end and a deformable diaphragm. A semiconductor strain gauge is associated with the diaphragm and deforms in accordance with deformation of the diaphragm. The base has a first surface opposing the semiconductor plate free end. The first surface of the base has a recess for limiting movement of the semiconductor plate free end. The recess extends to and opens at a second surface of the base which differs from the first surface.

REFERENCES:
patent: 3089343 (1963-05-01), Rule
patent: 3557628 (1971-01-01), Tsukada
patent: 3884085 (1975-05-01), Beckman et al.
patent: 4164263 (1979-08-01), Heintz et al.
patent: 4275586 (1981-06-01), Gast et al.
"A Batch-Fabricated Silicon Accelerometer" by Lynn Michelle Roylance et al., IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.

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