Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent
1992-10-01
1994-09-06
Raevis, Robert
Measuring and testing
Instrument proving or calibrating
Volume of flow, speed of flow, volume rate of flow, or mass...
G01P 2102
Patent
active
053437314
ABSTRACT:
Provided is a novel semiconductor accelerometer possessing an acceleration sensing feature including gage resistors on beams and a detecting feature for abnormality of the acceleration sensing feature in which the novel structure is manifested. The detection of abnormality of the acceleration sensing feature is accomplished by comparing a voltage applied to a bridge circuit comprising the gage resistors with a predetermined reference voltage. The detecting feature essentially comprises a comparator and a generator. The comparator compares the voltage applied to the bridge circuit with a predetermined reference voltage supplied from the voltage generator. When the gage resistors has abnormality in the sensing performance, the applied voltage takes a higher voltage than that in the normal state. Therefore, the comparison of the above both voltages permits recognizing the gage resistors to have abnormality. The result of the comparison may be transmitted either through the amplifier to a common terminal to the acceleration signals or through an executive output circuit to an executive output terminal.
REFERENCES:
patent: 4246566 (1981-01-01), Endo et al.
patent: 4895021 (1990-01-01), Ishizeki
patent: 5103667 (1992-04-01), Allen et al.
"Understanding Silicon Accelermeters", by Henry V. Allen, et al., 10 pages, text beginning with A new class of sensors . . . on the first page and ending with . . . David Aupers. on the last page.
"A Batch-Fabricated Silicon Accelerometer", by L. M. Roylance, et al., IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.
NEC Corporation
Raevis Robert
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