Semiconductor acceleration sensor using semiconductor microworki

Details Semiconductor acceleration sensor using semiconductor microworki Semiconductor acceleration sensor using semiconductor microworki

1997-10-14

1999-10-05

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351436, 200 6153, G01P 1508

Patent

active

059627891

ABSTRACT:
A semiconductor acceleration sensor comprising a rectangular semiconductor substrate on the moving electrode side and a rectangular semiconductor substrate on the fixed electrode side laminated on each other, the moving electrode side substrate being formed with a heavy weight and a thin cantilever, a moving electrode being provided on the heavy weight, a first electrostatic attraction electrode being provided on the cantilever, the fixed electrode side substrate being formed with a fixed electrode at a position opposed to the moving electrode and a second electrostatic attraction electrode at a position opposed to the electrostatic attraction electrode. The first and second electrostatic attraction electrodes are placed facing each other. A predetermined spacing is provided between the electrostatic attraction electrodes and a predetermined voltage is applied therebetween.

REFERENCES:
patent: 5596194 (1997-01-01), Kubena
patent: 5744717 (1998-04-01), Tanten
patent: 5756895 (1998-05-01), Kubena

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