Semiconductor acceleration sensor including off axis acceleratio

Details Semiconductor acceleration sensor including off axis acceleratio Semiconductor acceleration sensor including off axis acceleratio

1991-07-03

1993-05-25

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

338 46, G01P 1512

Patent

active

052129861

ABSTRACT:
A semiconductor acceleration sensor has an acceleration sensor element on which gauge resistors are arranged so as to cancel sensed output component corresponding to any acceleration acting in a direction different from an acceleration to be sensed. Consequently, acceleration can be precisely sensed without being influenced by acceleration acting in different

REFERENCES:
patent: 3572109 (1971-03-01), Yerman
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4829822 (1989-05-01), Imai et al.

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