Semiconductor acceleration sensor including means for detecting

Details Semiconductor acceleration sensor including means for detecting Semiconductor acceleration sensor including means for detecting

1994-01-13

1995-05-16

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

338 2, G01P 1512

Patent

active

054150442

ABSTRACT:
A semiconductor acceleration sensor includes at least two mutually independent electrodes on a surface of an acceleration sensing beam to which a weight is secured, the surface of the weight being electrically conductive and connecting the electrodes together. The electrodes are serially connected with a power supply for a bridge circuit. When the weight is separated from the acceleration sensing beam, disconnection of the electrodes on the beam occurs and the bridge is disconnected from the power supply, producing an abnormal output. Thus, it is possible to positively sense separation of the weight from the beam.

REFERENCES:
patent: 5081867 (1992-01-01), Yamada
patent: 5103667 (1992-04-01), Allen et al.

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