Semiconductor acceleration sensor device and method for...

Measuring and testing – Speed – velocity – or acceleration – Structural installation or mounting means

Reexamination Certificate

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C073S514330

Reexamination Certificate

active

07568390

ABSTRACT:
Although a weight part of an acceleration sensor chip fixed on a die pad is coated with a gelatinous resin part of low elasticity, the weight part is easily displaced by an external acceleration. Thus, an acceleration can be detected with accuracy. Furthermore, long-term reliability equal to those of regular resin packages is ensured because those portions of an acceleration sensor device which are not used for acceleration sensing are sealed with a resin part.

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