Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2006-10-17
2006-10-17
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S051000, C438S053000, C438S050000, C438S056000, C438S057000, C438S385000, C257S440000, C257S444000, C257S417000, C257S418000, C257S419000, C257S420000, C257S421000, C257SE21505, C073S514330, C073S514110
Reexamination Certificate
active
07122396
ABSTRACT:
The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portion9is constituted by four trapezoidal inclined surfaces13of a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weight3is so constructed as to have an abutting portion including a linear portion3dwhich abuts against the inclined surfaces13constituting the inner peripheral surface of the support portion9when the weight3makes a maximum displacement in a direction where a diaphragm portion11is located. The abutting portion3dhas a circular outline shape as seen from a side where a weight fixing portion7is located. A stopper structure is constituted by the inclined surfaces13and the abutting portion3dof the weight3, for restricting a displacement range of the weight3in the direction where the diaphragm portion11is located.
REFERENCES:
patent: 6551853 (2003-04-01), Toyoda
patent: 6632697 (2003-10-01), Ueyanagi et al.
Ando Masato
Nakamizo Yoshiyuki
Sawai Tsutomu
Ahmadi Mohsen
Hokuriku Electric Industry Co., Ltd.
Lebentritt Michael
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