Semiconductor acceleration sensor and method of testing the...

Measuring and testing – Instrument proving or calibrating – Speed – velocity – or acceleration

Reexamination Certificate

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C324S765010

Reexamination Certificate

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10868905

ABSTRACT:
Electrical characteristics of a semiconductor acceleration sensor containing a switched capacitor filter (15) are tested while the semiconductor acceleration sensor (1, 30, 50, 70, 90) is vibrated to apply a predetermined acceleration to the semiconductor acceleration sensor (1, 30, 50, 70, 90). The vibration frequency is fixed to a low frequency (for example, 50 Hz) at which the acceleration can be stably applied, and the characteristic of LPF is varied to plural kinds by a signal from an external testing apparatus (2, 40, 60, 80, 95). A sensor signal is received under each of the plural filter characteristics, and if these are within a predetermined specific range, the semiconductor acceleration sensor (1, 30, 50, 70, 90) is judged to be normal.

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Office Action from Japanese Patent Office issued on Jun. 27, 2006 for the corresponding Japanese patent application No. 2003-178152.
Office Action mailed on Oct. 10, 2006 issued from Japanese Patent Office for counterpart application No. 2003-178152. 2 pages in Japanese + 1 page translation.

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