Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2006-09-19
2006-09-19
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514380
Reexamination Certificate
active
07107847
ABSTRACT:
A semiconductor acceleration sensor comprises: a frame having an opening inside thereof; flexible beams extending from the frame to the inside of the opening of the frame; a weight suspended from and supported by the beams so that the weight can freely move; piezoresistors to be mounted on the beams and to vary the resistance values in response to accelerations which work on the piezoresistors. The frame comprises damper plate portions, each of which covers a part of the opening spanning from a corner portion of two neighboring sides of the frame on the side of the opening to the inside of the opening, and each of which serves serve as a stopper to limit movement of the weight. The weight has corner portions which face the corner portions, respectively, and each of which is chamfered to have a shape of arc or a polygonal line consisting of at least three sides as seen in plan view. Thereby, the breaking strength of each stopper is increased, and hence a semiconductor acceleration sensor having superior shock resistance can be obtained.
REFERENCES:
patent: 5060504 (1991-10-01), White et al.
patent: 5121633 (1992-06-01), Murakami et al.
patent: 5134881 (1992-08-01), Henrion et al.
patent: 5313836 (1994-05-01), Fujii et al.
patent: 6772632 (2004-08-01), Okada
patent: 6805008 (2004-10-01), Selvakumar et al.
patent: 0899574 (1999-03-01), None
patent: 1298442 (2003-04-01), None
patent: 8-327656 (1996-12-01), None
patent: 9-82984 (1997-03-01), None
patent: 11-135804 (1999-05-01), None
patent: 2000-502442 (2000-02-01), None
patent: 2002-257845 (2002-09-01), None
patent: 2003-329702 (2003-11-01), None
patent: 95/26509 (1995-10-01), None
patent: 97-22011 (1997-06-01), None
patent: 03/023414 (2003-03-01), None
English Language Abstract of JP 8-327656.
English Language Abstract of JP 9-82984.
English Language Abstract of JP 11-135804.
English Language Abstract of JP 2000-502442.
English Language Abstract of JP 2002-257845.
English Language Abstract of JP 2003-329702.
Akai Sumio
Goto Koji
Kataoka Kazushi
Miyajima Hisakazu
Morii Makoto
Chapman John E.
Greenblum & Bernstein P.L.C.
Matsushita Electric & Works Ltd.
LandOfFree
Semiconductor acceleration sensor and method of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor acceleration sensor and method of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor acceleration sensor and method of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3590723