Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1996-01-25

1997-11-11

Scott, J. R.

Electricity: circuit makers and breakers

Special application

Change of inclination or of rate of motion responsive

7351416, 7351421, 7351436, G01P 1500, H01H 3514, H01L 2984

Patent

active

056867115

ABSTRACT:
A highly reliable semiconductor acceleration sensor in which the amplification of the oscillation of the cantilever beam does not become large and break the beam. The semiconductor acceleration sensor has a beam support provided on a circuit substrate and a flexible acceleration detection beam deflecting according with the applied acceleration. An adhesive is disposed between the beam support and the acceleration detection beam. The semiconductor acceleration sensor has a sensor element for converting the deflection of the acceleration detection beam into an electrical signal. The natural oscillation frequency of the support section, formed by the adhesive and a root section of the beam which is fixed to the adhesive and the resonance frequency of the acceleration detection beam section extending from the root section do not overlap.

REFERENCES:
patent: 3727209 (1973-04-01), White et al.
patent: 5058960 (1991-10-01), Eccleston et al.
patent: 5081867 (1992-01-01), Yamada
patent: 5231879 (1993-08-01), Yamamoto
patent: 5265473 (1993-11-01), Funabashi
patent: 5379640 (1995-01-01), Yamamoto
patent: 5410915 (1995-05-01), Yamamoto
patent: 5415044 (1995-05-01), Yamamoto
patent: 5460044 (1995-10-01), Yamamoto

Affiliated with

Also associated with

Rating

Semiconductor acceleration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor acceleration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor acceleration sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1231185