Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1996-08-12

1998-01-13

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351434, G01P 1509

Patent

active

057082073

ABSTRACT:
A semiconductor acceleration sensor for detecting accelerations applied in two orthogonal directions includes a semiconductor body having a peripheral frame, a central weight disposed within the peripheral frame, and first and second beams extending from and connecting the peripheral frame and the weight. At least four piezoresistors are disposed on each of the first and second beams and are electrically connected in first and second bridge circuits. Each bridge circuit includes two piezoresistors from each of the two beams so that accelerations applied perpendicular and parallel to the semiconductor body can be individually detected with a single semiconductor acceleration sensor.

REFERENCES:
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patent: 3693425 (1972-09-01), Starita et al.
patent: 4430895 (1984-02-01), Colton
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 5060504 (1991-10-01), White et al.
patent: 5065628 (1991-11-01), Benecke
patent: 5239870 (1993-08-01), Kaneko
patent: 5251485 (1993-10-01), Kondo

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