Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1997-02-07

2000-12-12

Moller, Richard A.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1512

Patent

active

061582832

ABSTRACT:
A semiconductor acceleration sensor comprises a cantilever structure formed from a semiconductor wafer and having a first surface for receiving an acceleration force, a second surface disposed generally orthogonal to the first surface, and strain sensing portions disposed on the second surface. A supporting body supports the cantilever structure. A plurality of bridge circuits are disposed on the second surface of the rectangular parallelepiped shaped structure. Each of the bridge circuits has a plurality of the strain sensing portions.

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patent: 5415044 (1995-05-01), Yamamoto
patent: 5606128 (1997-02-01), Araki
patent: 6005275 (1999-12-01), Shinogi et al.

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