Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

2007-05-29

2007-05-29

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C338S002000

Reexamination Certificate

active

11238012

ABSTRACT:
A semiconductor acceleration sensor is disclosed which has a small difference in acceleration detection sensitivity among X, Y, and Z axes and a high detection sensitivity. The acceleration sensor has a mass portion in its center, a support frame surrounding the mass portion, and a plurality of flexible arms connecting the mass portion and the support frame. The flexible arm has wider portions on both ends and a narrower portion between the wider portions. Piezo resistors are restrictedly provided within a top surface region of the wider portion of the flexible arm, and through holes connecting metal wires and the piezo resistors are disposed on the mass portion/support frame. The plurality of flexible arms are symmetric with respect to the center of the mass portion, and each of the flexible arms is symmetric with respect to the center line of the flexible arm.

REFERENCES:
patent: 5412986 (1995-05-01), Beringhause et al.
patent: 2003-279592 (2003-10-01), None
patent: 2003-294781 (2003-10-01), None

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