Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1997-04-18

1999-12-28

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1512

Patent

active

060066067

ABSTRACT:
A semiconductor acceleration sensor comprises a sensor element having a first surface for receiving an acceleration force and second opposite surfaces disposed generally perpendicular to the first surface, a support for supporting and fixing the sensor element, and a detecting device disposed on the second opposite surfaces of the sensor element for detecting a variation of a physical quantity due to an acceleration force applied to the first surface of the sensor element.

REFERENCES:
patent: 4891982 (1990-01-01), Norling
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4969359 (1990-11-01), Mikkor
patent: 5000817 (1991-03-01), Aine
patent: 5212986 (1993-05-01), Takeuchi
patent: 5343064 (1994-08-01), Spangler et al.

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