Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1995-05-15

1996-10-22

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73522, 7351414, G01P 1508

Patent

active

055678785

ABSTRACT:
A cantilever semiconductor acceleration sensor element is supported by a pedestal fixed to a base. The base is sealed with a cap, forming an airtight space between the cap and the base that is filled with silicone oil. A central portion of the cap is deformed by an external force to increase the pressure of the silicone oil in the space to a pressure above atmospheric pressure. The generation of air bubbles on the sensor element, even at low temperature, is avoided because of the high pressure of the silicone oil.

REFERENCES:
patent: 4922753 (1990-05-01), Idogaki
patent: 4967597 (1990-11-01), Yamada

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