Semiconductor acceleration detecting device

Details Semiconductor acceleration detecting device Semiconductor acceleration detecting device

1995-12-26

1997-02-25

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351433, 73 1D, G01P 1512, G01P 1509

Patent

active

056061285

ABSTRACT:
A semiconductor acceleration detecting device provided with a pedestal electrically and mechanically connected to an electrode mounted on a base with an electrically conductive adhesive, a semiconductor chip electrically and mechanically connected to the pedestal with an electrically conductive adhesive like a cantilever, and a strain gauge for detecting deformation of the semiconductor chip due to an applied acceleration. Current used for detecting detachment flows from the electrode into a wire connected to a grounding terminal through the pedestal and the semiconductor chip. Moreover, a detachment between the base and the pedestal or between the pedestal and the semiconductor chip is sensed by detecting whether the current flows normally. Thereby, erroneous acceleration of the object can be prevented from being measured.

REFERENCES:
patent: 5415044 (1995-05-01), Yamamoto
patent: 5460044 (1995-10-01), Yamamoto
patent: 5499526 (1996-03-01), Muro

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