Semiconductor acceleration detecting apparatus

Details Semiconductor acceleration detecting apparatus Semiconductor acceleration detecting apparatus

1993-12-22

1995-10-24

Chilcot, Jr., Richard E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73 1D, G01P 1509

Patent

active

054600448

ABSTRACT:
In a semiconductor acceleration detecting apparatus, an amplification circuit is provided on a movable portion of an acceleration detecting beam, not on a fixed portion thereof, and the size of the fixed portion and the circuit area thereon are thus reduced. A damage detecting circuit is mounted on the fixed portion to detect breakage of the acceleration detecting beam and damage to various circuits, and a damage detecting interconnection is disposed along a peripheral edge of the movable portion, across a diaphragm and across an outer peripheral edge of the movable portion. Consequently, the size of the acceleration detecting beam can be reduced without changing the size of the movable portion i.e., without changing the characteristics of the apparatus, thus reducing the entire size of the semiconductor acceleration detecting apparatus.

REFERENCES:
patent: 4829822 (1989-05-01), Imai et al.
patent: 5060504 (1991-10-01), White et al.
patent: 5343731 (1994-09-01), Miyano
patent: 5351542 (1994-10-01), Ichimura et al.

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