Semiconductor absolute pressure transducer assembly and method

Details Semiconductor absolute pressure transducer assembly and method Semiconductor absolute pressure transducer assembly and method

1979-04-04

1981-10-13

Albritton, C. L.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

29610SG, 338 42, G01L 122

Patent

active

042951151

ABSTRACT:
A semiconductor absolute pressure transducer assembly has a silicon diaphragm assembly and a covering member. The silicon diaphragm assembly has a circular pressure sensitive diaphragm, on the surface of which are diffused piezoresistors and conducting paths. The covering member composed of borosilicate glass has a circular well formed therein. On the surface of the silicon diaphragm assembly on which the piezoresistors and the conducting paths are diffused, a passivating layer of silicon dioxide is deposited. Further on the passivating layer, a conductive layer is formed by, for example, evaporating silicon. And the glass covering member is bonded on the silicon diaphragm assembly by anodic bonding. Namely, the silicon diaphragm assembly and the glass covering member are heated up to a certain high temperature and a relative high voltage applied across the conductive layer of the silicon diaphragm assembly and the glass covering members.

REFERENCES:
patent: 3397278 (1968-08-01), Pomerantz
patent: 3697917 (1972-10-01), Orth et al.
patent: 4019388 (1977-04-01), Hall et al.
patent: 4023562 (1977-05-01), Hynecek et al.
patent: 4040172 (1977-08-01), Kurtz et al.

Affiliated with

Also associated with

Rating

Semiconductor absolute pressure transducer assembly and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor absolute pressure transducer assembly and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor absolute pressure transducer assembly and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-933589