Semi-open liquid phase epitaxial growth system

Details Semi-open liquid phase epitaxial growth system Semi-open liquid phase epitaxial growth system

1980-03-24

1981-04-21

Ozaki, G.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

148172, H01L 21208

Patent

active

042630657

ABSTRACT:
A semi-open method for growing an epitaxial layer on a substrate by increasing the pressure, refluxing the volatile components, contacting the substrate with the melt solution, and reducing the solution temperature.

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Vohl et al., J. Elect. Mat., vol. 7, No. 5, 1978, pp. 659-678.
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