Compositions: ceramic – Ceramic compositions – Refractory
Patent
1997-11-25
1999-09-28
Marcheschi, Michael
Compositions: ceramic
Ceramic compositions
Refractory
501 986, 279128, C04B 35581, B23Q 315
Patent
active
059588136
ABSTRACT:
The semi-insulating aluminum nitride sintered body of this invention is composed of aluminum nitride particles, electroconductive fine particles having a volume inherent resistivity value of not larger than 10.sup.2 .OMEGA..multidot.cm which are dispersed among the aluminum nitride particles and an intergranular phase formed from an oxide containing at least one element selected from the group consisting of Ti, Ce, Ni, Ta, Y, Er and Yb, or from Si. This sintered body has a volume inherent resistivity value of 10.sup.4 to 10.sup.11 .OMEGA..multidot.cm, and is very useful, for example, as a member for removing static electricity, or a dielectric layer of an electrostatic chuck. Since dispersions of volume inherent resistivity values are very small, a material having a volume inherent resistivity value within a certain range can be produced with good reproducibility. Accordingly, the yield is high, and the productivity is very good.
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Aida Hiroshi
Fukudome Takero
Ito Yumiko
Mikami Kazuhiko
Kyocera Corporation
Marcheschi Michael
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