Coating apparatus – With cutting – punching or tearing of work – Web or sheet work
Patent
1974-11-14
1976-06-22
Kaplan, Morris
Coating apparatus
With cutting, punching or tearing of work
Web or sheet work
118 69, 219 1079, C23C 1308
Patent
active
039644308
ABSTRACT:
A quartz reactor tube is provided with an electrically conductive hollow tube shaped into a coil surrounding but not contacting the outside surface of the quartz tube. The coil serves a double purpose of indirectly heating semi-conductor wafers within the quartz tube when the coil is energized with radio frequency energy, and serves to cool the outside surface of the quartz tube by directing air thereagainst through a large number of holes provided in the tubing. The air streams breakup a stagnant air insulating layer on the outside surface of the reactor tube in order to permit heat to be transferred from the tube to its surroundings. The cooler tube results in less gaseous material being deposited on its inside surfaces and thus increases the interval between reactor tube cleanings.
REFERENCES:
patent: 2339157 (1944-01-01), Denneen et al.
patent: 2512893 (1950-06-01), Gehr
patent: 2528714 (1950-11-01), Wadhams
patent: 2556243 (1951-06-01), Vaughn
patent: 2848566 (1958-08-01), Limpel
patent: 3092511 (1963-06-01), Edelman
patent: 3404462 (1968-10-01), Hanson et al.
patent: 3472200 (1969-10-01), Gerling
patent: 3862397 (1975-01-01), Anderson et al.
Kaplan Morris
Unicorp Incorporated
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