Semi-conductor diffusion furnace components

Details Semi-conductor diffusion furnace components Semi-conductor diffusion furnace components

1986-06-24

1988-09-13

Dixon, Jr., William R.

Compositions: ceramic

Ceramic compositions

Carbide or oxycarbide containing

501 88, C04B 3554

Patent

active

047710217

ABSTRACT:
A component for a semi-conductor diffusion furnace includes a sintered silicon carbide matrix resulting from sintering of silicon carbide powder. The silicon carbide power consists essentially of silicon carbide having an average particle size of 10-200 microns (preferably 30-170 microns) and is mixed with fine carbon powder and fine silicon powder.

REFERENCES:
patent: 3951587 (1976-04-01), Alliegro et al.

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