Semi-conductor accelerometer

Details Semi-conductor accelerometer Semi-conductor accelerometer

1985-12-09

1987-09-08

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

338 5, 338 43, G01P 1512

Patent

active

046915680

ABSTRACT:
A square diaphragm formed of monocrystalline silicon and integrally attached to a silicon frame surrounding the diaphragm at its four edges. A serpentine resistor is diffused into the surface of the diaphragm adjacent each of the edges and the resistors are connected in a Wheatstone bridge configuration. The frame of the diaphragm is anodically bonded to a pyrex base member so that all four edges of the diaphragm are fixed relative to the base member and each other. The volume between the base member and the diaphragm is vented to prevent any differential pressure from occurring on the diaphragm.

REFERENCES:
patent: 3272006 (1966-09-01), Eckard
patent: 4116075 (1978-09-01), Ort
patent: 4129042 (1978-12-01), Rosvold
patent: 4411158 (1983-10-01), Schaff, Jr.
patent: 4430895 (1984-02-01), Colton

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