SEM test apparatus

Details SEM test apparatus SEM test apparatus

2006-05-05

2008-10-14

Nguyen, Kiet T (Department: 2881)

Electricity: measuring and testing

Particle precession resonance

Using an electron resonance spectrometer system

C324S309000, C315S039510, C315S039770

Reexamination Certificate

active

07436177

ABSTRACT:
Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.

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