Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent
1993-10-18
1995-08-29
Raevis, Robert
Measuring and testing
Instrument proving or calibrating
Volume of flow, speed of flow, volume rate of flow, or mass...
G01P 2102
Patent
active
054450063
ABSTRACT:
An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, means for producing a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.
REFERENCES:
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patent: 5103667 (1992-04-01), Allen et al.
patent: 5253510 (1993-10-01), Allen et al.
Pasricha et al., "Design, Construction and Calibration of an Accelerometer", J. Technol vol. 12, No. 2, Dec. 1967.
Bouche, "Accurate Accelerometers Calibrations by Absolute and Comparison Methods", Endevco Tech Data, TPC 233, 1966.
Johansson, "Accelerometer Calibration", Instruments & Control Systems, pp. 79-81, Dec. 1963.
Allen Henry V.
De Bruin Diederik W.
Terry Stephen C.
IC Sensors Inc.
Raevis Robert
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