Self-testable micro-accelerometer

Details Self-testable micro-accelerometer Self-testable micro-accelerometer

1992-07-17

1993-10-19

Raevis, Robert

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

G01P 1508

Patent

active

052535100

ABSTRACT:
An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capacitive plate and the mass causes a movement of the mass, electrodes for applying a potential difference between the mass and the capacitive plate, and at least one piezoresistive element attached to the housing and the diaphragm for sensing movement of the mass. The accelerometer's housing comprises a frame, a base and a cap with air gaps providing squeeze film damping and mechanical stops for inhibiting movements of the mass. The combination of the capability to electrostatically produce a movement of the mass and the piezoresistive sensing of that movement allows testing and calibration of the accelerometer at any stage in its manufacture or deployment without the need for external equipment such as shakers.

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patent: 5060504 (1991-10-01), White et al.

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