Self-shadowing MEM structures

Details Self-shadowing MEM structures Self-shadowing MEM structures

2005-08-30

2005-08-30

Vortman, Anatoly (Department: 2835)

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

Fusible element actuated

C337S142000, C337S150000, C359S224200

Reexamination Certificate

active

06937131

ABSTRACT:
Self-shadowed microelectromechanical structures such as self-shadowed bond pads, fuses and compliant members and a method of fabricating self-shadowing microelectromechanical structures that anticipate and accommodate blanket metalization process steps are disclosed. In one embodiment, a self-shadowed bond pad (10) configured for shadowing an exposed end (44A) of a shielded interconnect line (44) connected to the bond pad (10) from undesired metalization during a metalization fabrication process step includes electrically connected overlaying first, second and third bond pad areas (42, 72, 92) patterned from respective first, second and third layers (40, 70, 90) of material deposited on a substrate (20). The exposed end (44A) of the interconnect line (44) abuts an edge of the first bond pad area (42). The third bond pad area (92) includes at least one tab portion (94) extending laterally from an edge of the third bond pad area (92) to shadow an area on the substrate (20) including the exposed end (44A) of the interconnect line (44) abutting the edge of the first bond pad area (42).

REFERENCES:
patent: 5095401 (1992-03-01), Zavracky et al.
patent: 5151153 (1992-09-01), Bol
patent: 5326726 (1994-07-01), Tsang et al.
patent: 5504026 (1996-04-01), Kung
patent: 5637904 (1997-06-01), Zettler
patent: 5696619 (1997-12-01), Knipe et al.
patent: 5783340 (1998-07-01), Farino et al.
patent: 5798283 (1998-08-01), Montague et al.
patent: 5804084 (1998-09-01), Nasby et al.
patent: 5814554 (1998-09-01), De Samber et al.
patent: 5919548 (1999-07-01), Barron et al.
patent: 5963788 (1999-10-01), Barron et al.
patent: 5994816 (1999-11-01), Dhuler et al.
patent: 6020272 (2000-02-01), Fleming
patent: 6082208 (2000-07-01), Rodgers et al.
patent: 6199269 (2001-03-01), Greco et al.
patent: 6501107 (2002-12-01), Sinclair et al.
patent: 6545385 (2003-04-01), Miller et al.
patent: 2001/0048265 (2001-12-01), Miller et al.
patent: 783108 (1997-07-01), None

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