Self-regulating power supply for micro electronic mechanical...

Details Self-regulating power supply for micro electronic mechanical... Self-regulating power supply for micro electronic mechanical...

2008-09-18

2011-12-13

Berhane, Adolf (Department: 2838)

Electricity: power supply or regulation systems

Self-regulating

Reexamination Certificate

active

08076921

ABSTRACT:
Systems and methods for a self-regulating power supply for MEMS thermal actuators to achieve maximum actuator displacement while preventing over powering. The present invention includes a power supply configured to regulate electrical input power to a MEMS thermal actuator in order to provide the maximum possible electrical input power. Accordingly, the present invention provides a maximum actuator displacement while preventing device failure from over powering. The present invention utilizes resistivity versus temperature properties for silicon or the like to provide a self-regulating power supply that can be utilized to power a variety of MEMS components without requiring custom actuator control circuits for each type of component.

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Baker, et al. Final report, Compliant Thermo-Mechanical MEMS Actuators LDRD, Sandia National Laboratories, Dec. 2004.

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