Self-referencing scan-shear interferometer

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356359, G01B 902

Patent

active

046873325

ABSTRACT:
A scan-shear interferometer comprises a beamsplitter (11) for dividing an optical beam into a transmitted component I and a reflected component II, which are propagated in opposite directions along a triangular portion of an optical path defined by mirrors (12) and (13) back to the beamsplitter (11), from which the beam component I is transmitted and the beam component II is reflected to a mirror (14), which reflects the beam components I and II coincidentally to form pupils on an interference plane at a photodetector device (15). A rotating prism (16) is positioned so that each of the beam components I and II makes a double pass through the prism (16) before reaching the interference plane. Rotation of the prism (16) causes the pupil formed by the beam component II to remain stationary, and causes the pupil formed by the beam component I to move across the stationary pupil along a scan axis on the interference plane. The photodetector device (15) comprises a linear array of photodetector elements positioned along an axis perpendicular to the scan axis. The mirror (12) is tilted to introduce a shearing of the moving pupil with respect to the stationary pupil along the axis of the photodetector array. Each photodetector element generates an electronic signal indicative of a temporarily varying one-dimensional phase profile of a local portion of the wavefront of the beam. Electronic signals from all the photodetector elements of the array are processed to provide inputs to a standard algorithm for reconstructing a two-dimensional phase distribution of the beam wavefront.

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