Electric lamp and discharge devices – Discharge devices having a multipointed or serrated edge...
Reexamination Certificate
2005-05-31
2005-05-31
Williams, Joseph (Department: 2879)
Electric lamp and discharge devices
Discharge devices having a multipointed or serrated edge...
C313S310000, C313S336000, C313S351000, C445S050000
Reexamination Certificate
active
06900580
ABSTRACT:
A field emission device having bundles of aligned parallel carbon nanotubes on a substrate. The carbon nanotubes are oriented perpendicular to the substrate. The carbon nanotube bundles may be up to 300 microns tall, for example. The bundles of carbon nanotubes extend only from regions of the substrate patterned with a catalyst material. Preferably, the catalyst material is iron oxide. The substrate is preferably porous silicon, as this produces the highest quality, most well-aligned nanotubes. Smooth, nonporous silicon or quartz can also be used as the substrate. The method of the invention starts with forming a porous layer on a silicon substrate by electrochemical etching. Then, a thin layer of iron is deposited on the porous layer in patterned regions. The iron is then oxidized into iron oxide, and then the substrate is exposed to ethylene gas at elevated temperature. The iron oxide catalyzes the formation of bundles of aligned parallel carbon nanotubes which grow perpendicular to the substrate surface. The height of the nanotube bundles above the substrate is determined by the duration of the catalysis step. The nanotube bundles only grow from the patterned regions.
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Chapline Michael
Dai Hongjie
Fan Shou-shan
Franklin Nathan
Tombler Thomas
The Board of Trustees of the Leland Stanford Junior University
Williams Joseph
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