Self-multiplexed monolithic intrinsic infrared detector

Electrical transmission or interconnection systems – Nonlinear reactor systems – Parametrons

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357 16, 357 30, 357 61, 307221D, 250338, 250370, H01L 2978, H01L 29205, H01L 2714, H01L 3100

Patent

active

042570573

ABSTRACT:
In this monolithic detector array, a signal processing layer is epitaxially formed directly on an active detector layer. The active detector layer is supported by a transparent substrate. The three layers are made of intrinsic semiconductors of the same conductivity type (e.g., n-type). The semiconductor forming the active layer has a smaller bandgap than the signal processing and substrate layers. A plurality of vias of opposite conductivity type (e.g, p-type) extend through the signal processing layer into the active detector layer where they form p-n junctions with the active detector layer. These p-n junctions collect charges generated by the radiation and the vias conduct these charges to the signal processing layer where gates, AC background suppression circuitry, and a charge coupled device process the photogenerated signals.

REFERENCES:
patent: 4142198 (1979-02-01), Finnila et al.
patent: 4176369 (1979-11-01), Nelson et al.

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